Electron backscattered diffraction: An EBSD system added to an SEM is a valuable new tool in the materials characterization arsenal

摘要

Electron backscattered diffraction (EBSD) is the technique by which an SEM can be used to evaluate the microstructure of a sample based on crystallographic analysis. It is a quantitative technique that reveals grain size, grain boundary character, grain orientation, texture, and phase identity. The technique enables analysis of centimeter-sized samples with millimeter-sized grains, as well as thin films with nano-grains. The nominal angular resolution is -0.5 degree, and spatial resolution is related to the resolution of the SEM, but 10 nm grains can be distinguished in modern field emission SEM's. Sample size depends on the SEM sample-handling capability and other geometrical considerations, as well as the time available.