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Multiple-wave lateral shearing interferometry for wave-front sensing

机译:用于波前感测的多波横向剪切干涉法

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摘要

Multiple-wave achromatic interferometric techniques are used to measure, with high accuracy and high transverse resolution, wave fronts of polychromatic light sources. The wave fronts to be measured are replicated by a diffraction grating into several copies interfering together, leading to an interference pattern. A CCD detector located in the vicinity of the grating records this interference pattern. Some of these wave-front sensors are able to resolve wave-front spatial frequencies 3 to 4 times higher than a conventional Shack-Hartmann technique using an equivalent CCD detector. Its dynamic is also much higher, 2 to 3 orders of magnitude.
机译:多波消色差干涉技术被用于以高精度和高横向分辨率测量多色光源的波阵面。待测的波阵面通过衍射光栅复制到一起干扰的多个副本中,从而形成干涉图样。位于光栅附近的CCD检测器记录该干涉图样。这些波前传感器中的一些能够使用等效的CCD检测器分辨出比传统Shack-Hartmann技术高3至4倍的波前空间频率。它的动态也更高,为2到3个数量级。

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