Comparison of two methods of interpretation of Langmuir probe data for an inductively coupled oxygen plasma

摘要

The Langmuir probe technique has some drawback in applying to electronegative plasma since it is difficult to interpret the probe I - V data. The positive ion flux to the probe is modified due to the presence of negative ions. In this study, an inductively coupled oxygen RF plasma is employed to perform the Langmuir probe measurement of the electronegative discharge. Plasma parameters are obtained from Langmuir probe measurement using two different methods which are based on electron energy distribution function (EEDF) integrals, and the method based on the fluid model for the modified ion flux, respectively. The EEDF is measured by a double differentiation of the I - V characteristics according to the Druyvesteyn formula. The electron densities estimated based on the two methods are compared. The EEDF integral method gives little higher values than the modified ion flux method. It is observed that at low pressure the EEDF is close to a Maxwellian. Generally, as the pressure increases, the distributions switch to bi-Maxwellian and to Druyvesteyn, and suggest some depletion of electrons with larger energies. (C) 2006 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.