Performance of multilayer coatings in relationship to microstructure of metal layers. Characterization and optical properties of Mo/Si multilayers in extreme ultra-violet and X-ray ranges

摘要

Here we present a development of multilayer-based optics for the extreme ultraviolet (EUV) and x-ray range. The authors discuss results of the study of optical performance of Mo/Si coatings with regard to the microstructure of metal layers, which was analysed by x-ray diffraction (XRD) and by transmission electron microscopy (TEM). We have demonstrated an ability to control the microstructure of the multilayers via optimization of the deposition process, which is important for various EUV and x-ray applications of multilayer optics.