New methods for the production of blazed relief grating profiles using grating masks with either binary or harmonic transmittance have been developed. These methods are based on the recording of a scanning wave, properly modulated by a mask, through a grating period into photoresist. The applicability of the gratings produced by this method would be especially in the infrared or near-infrared wavelength regions in the reflection mode. These methods have been theoretically analysed and the principal ideas of the methods were experimentally verified. [References: 7]
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