Development of a New System for Measuring Elastic Modulus of Wear Resistant Film Based on Contact Deformation of a Coated Flat and Spherical Indenter

摘要

A new system for measuring an elastic modulus of wear resistant film coated on elastic foundation is developed. For this purpose, a precise numerical analysis of a relative normal approach 5 between an elastic spherical indenter and a half infinite elastic body on which the film is coated, is made to obtain the relationship between δ and the elastic modulus of film E, using three dimensional elastic theory and finite element method. In addition the measurement of 8 is made as a function of an applied load, using a new developed apparatus. In order to confirm the validity of the system, the elastic moduli of two kinds of WC+Co splayed films are measured, and compared with the results measured by nano-indentation tester. Both results showed a good agreement.