Elemental depth profiling with a wire in microbeam X-ray fluorescence analysis

摘要

This study proposes simple techniques involving the use of a thin wire set close to the sample surface to measure the elemental depth distribution in microbeam X-ray fluorescence analysis. One is the X-ray fluorescence detection in energy-dispersive mode using a solid-state detector in combination with the sample movement, and the other is in projection mode using an X-ray charge-coupled device camera. Theminimum depth resolution (spatial resolution) obtained with a thinMo wire is about 15 μm. Compared with a confocal depth-profiling method, wire depth-profile analysis is easy to implement, flexible, and has reasonable sensitivity.