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IEEE Micro Electro Mechanical Systems Conference

召开年：2018
召开地：Belfast(GB)
出版时间：-

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1.Material-independent nanowire-transfer method based on mechanical interlocking for high performance flexible devices

机译：基于机械互锁的材料无关的纳米线转移方法，用于高性能柔性器件
- 作者：Min-Ho Seo; SangHyun Park; Jae-Young Yoo; SungKyu Lim; Min-Seung Jo; Kwang-Wook Choi; Jae-Shin Lee; Soo-Bon Kim; Jun-Bo Yoon
- 会议名称：《IEEE Micro Electro Mechanical Systems Conference》 | 2018年
- Substrates;
- Gold;
- Nanowires;
- Etching;
- Chemicals;
- Resistance heating;
2.Quantitative analysis of optical transduction in microfluidic biosensing platforms: Nanoporous microbeads coupled with thin-film photodiodes

机译：定量分析微流控生物传感平台中的光转导：纳米多孔微珠与薄膜光电二极管结合
- 作者：Inês F. Pinto; Denis R Santos; Catarina R. F. Caneira; Ruben R. G. Soares; Virginia Chu; João P. Conde
- 会议名称：《IEEE Micro Electro Mechanical Systems Conference》 | 2018年
- Microfluidics;
- Fluorescence;
- Photodiodes;
- Optical sensors;
- Biomedical optical imaging;
- Biosensors;
- Proteins;
3.Differential method for undisturbed detection of 17β-estradiol using an integrated aptameric graphene nanosensor

机译：集成适体石墨烯纳米传感器的差异检测17β-雌二醇的无干扰方法
- 作者：Yijun Li; Yibo Zhu; Zhuang Hao; Cheng Wang; Zhixing Zhang; Miao He; Qiao Lin
- 会议名称：《IEEE Micro Electro Mechanical Systems Conference》 | 2018年
- Graphene;
- Testing;
- Sensitivity;
- Biosensors;
- Field effect transistors;
- Transconductance;
- Microfluidics;
4.Transparent graphene-AZO/ZNO/glass surface acoustic wave device for electronics and lab-on-a-chip applications

机译：透明的石墨烯-AZO / ZNO /玻璃表面声波器件，用于电子和芯片实验室应用
- 作者：Jian Zhou; Ding B. Xiao; Zhao X. Song; Ming Zhuo; Xue Z. Wu
- 会议名称：《IEEE Micro Electro Mechanical Systems Conference》 | 2018年
- Surface acoustic wave devices;
- Surface acoustic waves;
- Temperature sensors;
- Films;
- Zinc oxide;
- II-VI semiconductor materials;
5.Development of thin film based flexible pressure sensor and biomedical application to real-time pressure monitoring during radiofrequency ablation

机译：基于薄膜的柔性压力传感器的开发及其在射频消融过程中实时压力监测中的生物医学应用
- 作者：Yongrok Jeong; Jaeho Park; Kyuyoung Kim; Inkyu Park
- 会议名称：《IEEE Micro Electro Mechanical Systems Conference》 | 2018年
- Temperature sensors;
- Temperature measurement;
- Needles;
- Liver;
- Electrodes;
- Pressure sensors;
- Monitoring;
6.Highly flexible piezoelectric MEMS resonators encapsulated in polymer thin films

机译：封装在聚合物薄膜中的高柔性压电MEMS谐振器
- 作者：Lin Zhang; Yuan Jiang; Bohua Liu; Menglun Zhang; Wei Pang
- 会议名称：《IEEE Micro Electro Mechanical Systems Conference》 | 2018年
- Film bulk acoustic resonators;
- Substrates;
- Polyimides;
- Silicon;
- Resonators;
- Micromechanical devices;
- Fabrication;
7.MEMS at Bosch — Invented for life

机译：博世的MEMS —终身发明
- 作者：Franz Laermer
- 会议名称：《IEEE Micro Electro Mechanical Systems Conference》 | 2018年
- Micromechanical devices;
- Silicon;
- Sensor systems;
- Automotive engineering;
- Intelligent sensors;
- Magnetic sensors;
8.Sort'N merge: A deterministic microfluidic platform for co-encapsulating distinct particles in microdroplets

机译：Sort'N merge：确定性的微流体平台，用于将微颗粒中的不同颗粒共囊化
- 作者：Meng Ting Chung; Daniel Nunez; Dawen Cai; Katsuo Kurabayashi
- 会议名称：《IEEE Micro Electro Mechanical Systems Conference》 | 2018年
- Merging;
- Sorting;
- Microfluidics;
- Fluorescence;
- Electric fields;
- Throughput;
- Oils;
9.Visible range subtractive plasmonic color filter arrays using AG-AU alloyed nanoislands

机译：使用AG-AU合金纳米岛的可见范围减色等离子体彩色滤光片阵列
- 作者：Charles S. H. Hwang; Youngseop Lee; Myeong-Su Ahn; Taerin Chung; Ki-Hun Jeong
- 会议名称：《IEEE Micro Electro Mechanical Systems Conference》 | 2018年
- Plasmons;
- Gold;
- Fabrication;
- Optical filters;
- Image color analysis;
- Color;
10.Microneedle-based system for minimally invasive continuous monitoring of glucose in the dermal interstitial fluid

机译：基于微针的系统，用于微创连续监测皮肤组织液中的葡萄糖
- 作者：Federico Ribet; Göran Stemme; Nielas Roxhed
- 会议名称：《IEEE Micro Electro Mechanical Systems Conference》 | 2018年
- Electrodes;
- Sugar;
- Probes;
- Fluids;
- Sensors;
- Monitoring;
- Diabetes;
11.Asymmetric charge transfer phenomenon and its mechanism in self-excited electrostatic actuator

机译：自激静电致动器中的不对称电荷转移现象及其机理
- 作者：Zhiwei Liu; Xiaojun Yan; Mingjing Qi; Yangsheng Zhu; Xiaoyong Zhang; Liwei Lin
- 会议名称：《IEEE Micro Electro Mechanical Systems Conference》 | 2018年
- Electrodes;
- Oscillators;
- Electrostatic actuators;
- Charge transfer;
- Power generation;
- Capacitors;
12.MEMS enabled scalable fabrication of high performance lithium ion battery electrodes

机译：MEMS使高性能锂离子电池电极的可扩展制造成为可能
- 作者：Michael J. Synodis; Minsoo Kim; Sue Ann Bidstrup Allen; Mark G. Allen
- 会议名称：《IEEE Micro Electro Mechanical Systems Conference》 | 2018年
- Fabrication;
- Anodes;
- Cathodes;
- Manganese;
- Lithium;
- Ions;
13.Micro Coriolis MASS flow sensor driven by integrated PZT thin film actuators

机译：集成PZT薄膜执行器驱动的Micro Coriolis MASS流量传感器
- 作者：Y. Zeng; J. Groenesteijn; D. Alveringh; R.J.A. Steenwelle; K. Ma; R.J. Wiegerink; J.C. Lötters
- 会议名称：《IEEE Micro Electro Mechanical Systems Conference》 | 2018年
- Actuators;
- Electron tubes;
- Fluid flow measurement;
- Electrodes;
- Measurement by laser beam;
- Vibrometers;
- Fabrication;
14.Hydrogel tip attached quartz tuning fork using elastomeric tip mold replicated from electrochemically etched tungsten wire

机译：使用从电化学蚀刻钨丝复制而来的弹性体尖端模具将水凝胶尖端连接的石英音叉
- 作者：Juhee Ko; Amun Jarzembski; Keunhan Park; Jungchul Lee
- 会议名称：《IEEE Micro Electro Mechanical Systems Conference》 | 2018年
- Tungsten;
- Wires;
- Silicon;
- Etching;
- Imaging;
- Resonant frequency;
- Fabrication;
15.High stability thermal accelerometer based on ultrathin platinum ALD nanostructures

机译：基于超薄铂ALD纳米结构的高稳定性热加速度计
- 作者：Camille L. M. Everhart; Kirsten E. Kaplan; Martin M. Winterkorn; Heungdong Kwon; J Provine; Mehdi Asheghi; Kenneth E. Goodson; Fritz B. Prinz; Thomas W. Kenny
- 会议名称：《IEEE Micro Electro Mechanical Systems Conference》 | 2018年
- Temperature measurement;
- Accelerometers;
- Heating systems;
- Sensitivity;
- Thermal stability;
16.High dynamic range CMOS-MEMS capacitive accelerometer array

机译：高动态范围CMOS-MEMS电容式加速度计阵列
- 作者：Metin G. Guney;Xiaoliang Li;Vincent Pey J. Chung;Jeyanandh Paramesh;Tamal Mukherjee;Gary K. Fedder
- 会议名称：《》 | 2018年
- Accelerometers;
- Micromechanical devices;
- Electric shock;
- Acceleration;
- Dynamic range;
- Sensors;
- Bars;
17.Droplet height control by electrowetting-on-dielectric for selective contact fusion of droplets on facing substrates

机译：通过电介质上电润湿来控制液滴高度，以使液滴在面对的基材上选择性接触融合
- 作者：Chikara Ohya; Satoshi Konishi
- 会议名称：《IEEE Micro Electro Mechanical Systems Conference》 | 2018年
- Substrates;
- Electrodes;
- Electric fields;
- Contacts;
- Shape;
- Fabrication;
- Transportation;
18.Microfluidic oxygen sensor based on silica gels for longterm experiments

机译：基于硅胶的微流氧传感器可用于长期实验
- 作者：Frank Bunge; Sander van den Driesche; Anya Waite; Ursula Mirastschijski; Michael J. Vellekoop
- 会议名称：《IEEE Micro Electro Mechanical Systems Conference》 | 2018年
- Temperature measurement;
- Temperature sensors;
- Microfluidics;
- Silicon compounds;
- Semiconductor device measurement;
- Silicon;
19.Automated flow-based/digital microfluidic platform integrated with onsite electroporation process for multiplex genetic engineering applications

机译：自动化的基于流量/数字的微流控平台与现场电穿孔过程相集成，可用于多重基因工程应用
- 作者：Kosuke Iwai; David Ando; Peter W. Kim; Phillip C. Gach; Manasi Raje; Todd A. Duncomb; Joshua V. Heinemann; Trent R. Northen; Hector Garcia Martin; Nathan J. Hillson; Paul D. Adams; Anup K. Singh
- 会议名称：《IEEE Micro Electro Mechanical Systems Conference》 | 2018年
- Microfluidics;
- Electrodes;
- Fluorescence;
- System-on-chip;
- Multiplexing;
- Optical fiber devices;
- Optical fibers;
20.SNR enhancement of a spin-MEMS microphone by optimum bias magnetic field and demonstration of operation sound monitoring of rotating equipment

机译：通过最佳偏置磁场增强自旋MEMS麦克风的SNR并演示旋转设备的操作声音监控
- 作者：Y. Higashi; Y. Fuji; S. Kaji; K. Masunishi; T. Nagata; A. Yuzawa; K. Otsu; K. Okamoto; S. Baba; T. Ono; M. Hara
- 会议名称：《IEEE Micro Electro Mechanical Systems Conference》 | 2018年
- Microphones;
- Signal to noise ratio;
- Magnetic tunneling;
- Magnetization;
- Monitoring;
- Resonant frequency;
- Strain;
21.Rapid assembly of multilayer microfluidic structures

机译：多层微流体结构的快速组装
- 作者：C. Glick; A. Schwartz; M. Srimongkol; J. Lin; W. Zhuang; R. Warren; D. Tekell; P. Satamalee; L. Lin
- 会议名称：《IEEE Micro Electro Mechanical Systems Conference》 | 2018年
- Microfluidics;
- Three-dimensional displays;
- Valves;
- Nonhomogeneous media;
- Soft lithography;
- Bonding;
22.Direct and all-dry fabrication of paper-based microfluidic device using parylene-C deposition and maskless microplasma writing

机译：使用Parylene-C沉积和无掩模微等离子体写法直接和全干式制造纸基微流体装置
- 作者：Tao Wang; M. S. Hu; Bin Yang; X. L. Wang; Xiang Chen; Jing-Quan Liu
- 会议名称：《IEEE Micro Electro Mechanical Systems Conference》 | 2018年
- Microfluidics;
- Fabrication;
- Writing;
- Chemicals;
- Etching;
- Microscopy;
- Plasmas;
23.Dissolvable material-sheathed microneedle-electrode device slid into a narrow gap of the brain

机译：可溶材料护套的微针电极装置滑入大脑的狭窄缝隙
- 作者：Shota Yamagiwa; Hirohito Sawahata; Rika Numano; Makoto Ishida; Kowa Koida; Takeshi Kawano
- 会议名称：《IEEE Micro Electro Mechanical Systems Conference》 | 2018年
- Needles;
- Mice;
- Substrates;
- Coatings;
- Impedance;
- Electrodes;
- Brain;
24.Tip-enhanced nearfield grayscale thermal nanolithography

机译：尖端增强的近场灰度热纳米光刻
- 作者：Woonsoo Lee; Shaoqing Zhang; Zhitao Zhou; Tiger H Tao
- 会议名称：《IEEE Micro Electro Mechanical Systems Conference》 | 2018年
- Proteins;
- Nanostructures;
- Resists;
- Laser beams;
- Quantum cascade lasers;
- Lithography;
- Fabrication;
25.Tunable thermo-triboelectric energy harvesting using human body heat for self-powered applications

机译：利用人体热量进行可调节的热摩擦电能量收集，以用于自供电应用
- 作者：Dong Gun Enoch Lee
- 会议名称：《IEEE Micro Electro Mechanical Systems Conference》 | 2018年
- Thermal energy;
- Energy harvesting;
- Immune system;
- Magnetic materials;
- Generators;
- Temperature;
26.Dynamic control of an accelerometer bandwidth through tunable damping factor and effective moment of inertia

机译：通过可调阻尼系数和有效惯性矩动态控制加速度计带宽
- 作者：B. Fain; F. Souchon; A. Berthelot; R Anciant; P. Robert; G. Jourdan
- 会议名称：《IEEE Micro Electro Mechanical Systems Conference》 | 2018年
- Micromechanical devices;
- Accelerometers;
- Bandwidth;
- Resonant frequency;
- Damping;
- Q-factor;
- Couplings;
27.Microfluidic stepwise-waveform regulator driven by constant pressure

机译：恒压驱动的微流逐步波形调节器
- 作者：Geunyong Kim; Sung-Jin Kim
- 会议名称：《IEEE Micro Electro Mechanical Systems Conference》 | 2018年
- Oscillators;
- Regulators;
- Microfluidics;
- Stress;
- Valves;
- Capacitors;
- Chemicals;
28.Droplet-enhanced microspectrometry for trace level hexavalent chromium detection

机译：液滴增强显微光谱法检测痕量六价铬
- 作者：Xiaoping Li; Chuan Chen; Honglong Chang
- 会议名称：《IEEE Micro Electro Mechanical Systems Conference》 | 2018年
- Chromium;
- Actuators;
- Micromechanical devices;
- Optimized production technology;
- Oils;
- Phase measurement;
- Semiconductor device measurement;
29.Dielectric gradient metasurface for efficient terahertz wave focusing

机译：介电梯度超表面有效的太赫兹波聚焦
- 作者：D. Jia; Y. Tian; W. Ma; X. Gong; J. Yu; G. Zhao; X. Yu
- 会议名称：《IEEE Micro Electro Mechanical Systems Conference》 | 2018年
- Lenses;
- Resonators;
- Silicon;
- Dielectrics;
- Focusing;
- Plasmons;
- Metamaterials;
30.Microfluidic fabrication approach for atomic force microscope cantilevers with photocurable resins

机译：含光固化树脂的原子力显微镜悬臂的微流体制备方法
- 作者：Bora Lee; Yeowon Yoon; Jungchul Lee
- 会议名称：《IEEE Micro Electro Mechanical Systems Conference》 | 2018年
- Plastics;
- Fabrication;
- Silicon;
- Force;
- Polymers;
- Imaging;
- Microfluidics;
31.MEMS-based particle size magnifier for measuring ultra low nanoparticle concentration

机译：基于MEMS的粒径放大镜，用于测量超低纳米粒子浓度
- 作者：H. B. Kwon; S. J. Yoo; J. S. Han; S. M. Lee; U. S. Hong; J. H. Hwang; Y. J. Kim
- 会议名称：《IEEE Micro Electro Mechanical Systems Conference》 | 2018年
- Nanoparticles;
- Optical filters;
- Aerosols;
- Atmospheric measurements;
- Particle measurements;
- Optical saturation;
- Optical sensors;
32.Development of highly efficient micro energy harvesters with MgHf-codoped AlN piezoelectric films

机译：掺有MgHf的AlN压电薄膜的高效微能量采集器的开发
- 作者：Hung H. Nguyen; Le Van Minh; Hiroyuki Oguchi; Hiroki Kuwano
- 会议名称：《IEEE Micro Electro Mechanical Systems Conference》 | 2018年
- Aluminum nitride;
- III-V semiconductor materials;
- Silicon;
- Micromechanical devices;
- Power generation;
- Density measurement;
- Acceleration;
33.Autoparametric resonance in a piezoelectric MEMS vibration energy harvester

机译：压电MEMS振动能量采集器中的自参量共振
- 作者：Yu Jia; Sijun Du; Emmanuelle Arroyo; Ashwin A. Seshia
- 会议名称：《IEEE Micro Electro Mechanical Systems Conference》 | 2018年
- Micromechanical devices;
- Resonant frequency;
- Vibrations;
- Oscillators;
- Strain;
- Transducers;
- Acceleration;
34.Identifying spurious modes in RF-MEMS resonators using photoelastic imaging

机译：使用光弹性成像识别RF-MEMS谐振器中的杂散模式
- 作者：Vikrant J. Gokhale; Jason J. Gorman
- 会议名称：《IEEE Micro Electro Mechanical Systems Conference》 | 2018年
- Strain;
- Resonators;
- Shape;
- Measurement by laser beam;
- Vibrations;
- Micromechanical devices;
- Shape measurement;
35.Waveform optimization for resonantly driven MEMS switches electrostatically biased near pull-in

机译：谐振驱动的MEMS开关的波形优化，靠近吸合时会产生静电偏置
- 作者：Aleem M. Siddiqui;Christopher D. Nordquist;Alejandro Grine;Stefan Lepkowsk;M. David Henry;Matt Eichenfield;Benjamin A. Griffin
- 会议名称：《》 | 2018年
- Orbits;
- Limit-cycles;
- Electrodes;
- Modulation;
- Q-factor;
- Force;
- Space vehicles;
36.Through-package wireless powering via piezoelectric micromachined ultrasonic transducers

机译：通过压电微机械超声换能器实现封装无线供电
- 作者：Emad Mehdizadeh; Gianluca Piazza
- 会议名称：《IEEE Micro Electro Mechanical Systems Conference》 | 2018年
- Acoustics;
- Probes;
- Aluminum nitride;
- Programmable logic arrays;
- Electrodes;
- Couplings;
- III-V semiconductor materials;
37.High sensitivity micro electrometer based on clamped free curved beams resonator with weakened nonlinearity

机译：基于非线性减弱的自由曲面谐振器的高灵敏度微静电计
- 作者：Dongyang Chen; Xinxin Liu; Yong Wang; Zhonggui Xu; Hongyun Lin; Huicong Liu; Jin Xie
- 会议名称：《IEEE Micro Electro Mechanical Systems Conference》 | 2018年
- Resonant frequency;
- Sensors;
- Vibrations;
- Optical resonators;
- Perturbation methods;
- Force;
- Sensitivity;
38.Rapid thermal nanoimprinting on silk protein substrates for controlled degradation of transient devices

机译：在丝蛋白基质上进行快速热纳米压印，以控制瞬态器件的降解
- 作者：Zihan Gao; Zhitao Zhou; Hu Tao; Nan Qin
- 会议名称：《IEEE Micro Electro Mechanical Systems Conference》 | 2018年
- Micromechanical devices;