坮電素子で駆動される直動型変位拡大檆構の自己状慴眔視檆能

摘要

This report describes the self-monitoring function of a displacement magnifying mechanism linearly driven by piezo-electric elements. From precise experiments and FEM analysis, we found a method for predicting the driving state or displacement and force generated at the top of the mechanism. This prediction can be made from the applied voltage and the strain generated at the arm that contains the magnifying mechanism. The following findings were obtained. (1 ) It was confirmed that the driving state can be monitored by the applied voltage and strain. ( 2 ) For predicting the driving state, it is better to use the value of strain at a position removed from the center. For the same applied voltage, the strain at the inner surface more sharply changes than the strain at the outer surface. ( 3) The prediction processing should be separately made for stages of increasing and decreasing of applied voltage because the piezo-electric element has hysteresis.%圧電素子はその優れた制御性により，変位または力rn制御素子として広範な分野で用いられている．しかし，rn変位は数ミクロンから数十ミクロンと微小であることrnから，これを効率よく拡大する様々な機構が開発されrnている．著者の一人は差動型二段変位拡大機構を開発rnし，高速印字機構として実用に供した．