机译:反应粒子束辅助溅射工艺沉积用于硬掩模的非晶碳薄膜
Department of Control and Instrumentation Engineering, Korea University, Jochiwon, Chungnam, Korea;
Department of Control and Instrumentation Engineering, Korea University, Jochiwon, Chungnam, Korea;
Department of Computer and Applied Physics, Hanseo University, Haemi-myun, Seosan, Chungnam, Korea;
Department of Display and Semiconductor Physics, Korea University, Jochiwon, Chungnam, Korea;
Department of Display and Semiconductor Physics, Korea University, Jochiwon, Chungnam, Korea;
Department of Display and Semiconductor Physics, Korea University, Jochiwon, Chungnam, Korea;
Department of Control and Instrumentation Engineering, Korea University, Jochiwon, Chungnam, Korea;
amorphous carbon film; reactive particle beam assisted sputtering system; raman spectroscopy; ellipsometry;
机译:氩中性束能量对中性粒子束辅助溅射生长非晶碳薄膜结构性能的影响
机译:电子束沉积,离子辅助沉积,反应性低压离子镀和双离子束溅射沉积的二氧化硅薄膜的抗激光损伤性
机译:反应粒子束辅助化学气相沉积合成非晶硅薄膜的性能
机译:反应离子束溅射沉积合成氧化钒薄膜:工艺参数的影响
机译:碳溅射在四面结合非晶碳膜沉积中的实验和计算研究。
机译:由非晶碳薄膜制造用于电子束成形的相位掩模
机译:通过辉光放电和离子束辅助沉积沉积的非晶碳膜的硬度和应力