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Resistive switching characteristics and conduction mechanisms of nonvolatile memory devices based on Ga and Sn co-doped ZnO films

机译:基于Ga和Sn共掺杂ZnO薄膜的非易失性存储器件的电阻开关特性和导电机理

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Nonvolatile memory devices were fabricated utilizing Ga and Sn co-doped ZnO (GZTO) films formed by using a solution process method. X-ray diffraction patterns showed that the crystallinity of the annealed GZTO films was an amorphous phase. X-ray photoelectron spectroscopy spectra of the GZTO films depicted Zn - O, Ga - O, and Sn - O bonds. Current-voltage measurements on the Al/GZTO/indium-tin-oxide (ITO) devices at 300 K showed bipolar resistive switching behaviors. The resistances at both the low resistance state (LRS) and high resistance state (HRS) measured at 0.5 V for the devices maintain almost constant without any damage and breakdown above 130 s, indicative of the memory stability of the devices. A difference in the resistance between the HRS and the LRS was more than 1 order of the magnitude. The conduction mechanisms of the HRS in the set process for the Al/GZTO/ITO devices were dominated by a space-charge-limited current model. (C) 2015 Elsevier B.V. All rights reserved.
机译:利用通过溶液法形成的Ga和Sn共掺杂ZnO(GZTO)膜来制造非易失性存储器件。 X射线衍射图表明,退火的GZTO膜的结晶度为非晶相。 GZTO膜的X射线光电子能谱描述了Zn-O,Ga-O和Sn-O键。在300 K的Al / GZTO /铟锡氧化物(ITO)器件上的电流电压测量显示出双极电阻切换行为。器件在0.5 V下测量的低电阻状态(LRS)和高电阻状态(HRS)处的电阻几乎保持恒定,而在130 s以上没有任何损坏和击穿,这表明该设备的存储稳定性。 HRS和LRS之间的电阻差大于1个数量级。在Al / GZTO / ITO器件的设置过程中,HRS的传导机制受空间电荷限制电流模型支配。 (C)2015 Elsevier B.V.保留所有权利。

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