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首页> 外文期刊>Thin Solid Films >Corrosion protection of steel with multilayer coatings: Improving the sealing properties of physical vapor deposition CrN coatings with Al2O3/TiO2 atomic layer deposition nanolaminates
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Corrosion protection of steel with multilayer coatings: Improving the sealing properties of physical vapor deposition CrN coatings with Al2O3/TiO2 atomic layer deposition nanolaminates

机译:具有多层涂层的钢的腐蚀防护:使用Al2O3 / TiO2原子层沉积纳米层压板改善物理气相沉积CrN涂层的密封性能

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摘要

Atomic Layer Deposition (ALD) of Al2O3/TiO2 nanolaminate was applied to improve the sealing properties of CrN coating deposited with Physical Vapor Deposition (PVD) on high speed steel (HSS). The corrosion protection properties were explored with Linear Sweep Voltammetry and visual estimation. Nearly two orders of magnitude decrease in corrosion current density was obtained by applying plasma pre-treatment prior to ALD coating. Sealing of CrN pinholes was shown with Focused Ion Beam/Scanning Electron Microscope technique. The effect of the ALD deposition parameters to adhesion of the ALD coatings was investigated with Rockwell indentation and microscope analysis. Thickness and refractive index of the ALD coatings were measured with ellipsometry, and density and roughness of the ALD coatings were investigated with X-Ray Reflectivity measurements. Neutral Salt Spray testing was used to investigate the corrosion resistance of PVD/ALD nanolaminates on HSS dental curettes. (C) 2017 Elsevier B.V. All rights reserved.
机译:应用Al2O3 / TiO2纳米叠层的原子层沉积(ALD)来提高物理气相沉积(PVD)在高速钢(HSS)上沉积的CrN涂层的密封性能。用线性扫描伏安法和目测评估了防腐性能。通过在ALD涂层之前进行等离子体预处理,腐蚀电流密度降低了近两个数量级。用聚焦离子束/扫描电子显微镜技术显示了CrN针孔的密封。用Rockwell压痕和显微镜分析研究了ALD沉积参数对ALD涂层附着力的影响。通过椭圆偏振法测量ALD涂层的厚度和折射率,并且通过X射线反射率测量研究ALD涂层的密度和粗糙度。中性盐雾测试用于研究HSS牙科刮匙上PVD / ALD纳米层压板的耐腐蚀性。 (C)2017 Elsevier B.V.保留所有权利。

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