Reply To A Comment Of J. Zemek, Prague, Regarding The Paper 'resolving The Depth Coordinate In Photoelectron Spectroscopy - Comparison Of Excitation Energy Variation Vs. Angular-resolved Xps For The Analysis Of A Self-assembled Monolayer Model System'

摘要

In his comment to our recent paper about depth profile analysis by means of XPS [1], J. Zemek pointed out that our pessimistic conclusions about the application of angular-resolved XPS (ARXPS) to samples with rough surfaces underrate the potential of ARXPS in this field [2]. Indeed, it was known from the work of the Prague group that it is possible to account for the influence of surface roughness on ARXPS results. However, this influence depends strongly on the type of roughness profile present, in particular on the distribution of angles by which real surface facets deviate from the macroscopic surface orientation ([3], cited as Ref. [20] in [1]).