Non-visual defect inspection for comprehensive yield management

摘要

As new materials, processes, and structures are introduced at sub45nm nodes, surface quality requirements are becoming more stringent. Surface quality control issues can give rise to organic and metallic residues, charging, and other non-visual defects (NVDs). Whereas yield management strategies previously focused solely on physical defects such as particles and scratches, NVD inspection is becoming an integral part of yield management at these nodes.