FinFET evolution for the 7nm and 5nm CMOS technology nodes

摘要

In addition to extending the fin-based design investments, augmenting the FinFET for improved performance allows an evolution of the process infrastructure for a few more nodes. With 14nm CMOS technology node soon to be ready for production and the leaders in the industry busy with 10nm development, our R&D focus shifts to scaling devices for the 7nm and 5nm technology nodes.