Rapid Defect Identification with Layout-Aware Diagnosis

摘要

Scan logic diagnosis is a powerful tool to help failure analysis engineers determine the root cause of a failing die. Product and yield engineers, on the other hand, are interested in using diagnosis result to identify the defects that best represent systematic yield limiters. To be of value for both engineers, a diagnosis tool needs to be 1.Accurate, 2.With high resolution and 3.Meaningful defect classifications.