Unified current equation for predictive modeling of submicron MOSFETs

摘要

For short-channel submicron MOS devices, we presents unified current equation, which covers both weak and strong inversion. The current in weak inversion is controlled by the subthreshold slope, for which we derive a new physics-based, predictive model. Furthermore, a new model for the carrier mobility is presented, which allows to derive closed-form current equations with good scalability. The approaches have been implemented in the compact model PREDICTMOS and are qualified by comparison with numerical device simulations and measurements.