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Submillimeter wave GaAs Schottky diode application based study and optimization for 0.1-1.5 THz

机译:基于亚毫米波GaAs肖特基二极管的0.1-1.5 THz应用研究和优化

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In this paper, a design and optimization method for submillimeter-wave Schottky diode is proposed. Parasitic capacitance is significantly reduced to under 20% of the total capacitance of the diode. The parasitic capacitance value is measured to be 0.6 fF for 1 mu m anode radius which increased the cut-off frequency to 1.5 THz. A corresponding microfabrication process that provides higher degrees of freedom for the anode diameter, air-bridge dimensions and distance to the substrate is introduced and implemented. The DC and RF measurements are provided and compared with the simulations. In order to provide a better understanding of the diode behavior, the limiting factors of the cut-off frequency for different applications are studied and compared. For the mixer/multiplier mode, an improved and expanded formulation for calculation of the cut-off frequency is introduced. It is shown that the usable voltage bias range (with acceptable cut-off frequency) is limited by the exponential reduction of junction resistance, R-j, in mixer/multiplier mode. (C) 2017 Elsevier Ltd. All rights reserved.
机译:本文提出了一种亚毫米波肖特基二极管的设计与优化方法。寄生电容显着降低到二极管总电容的20%以下。阳极半径为1μm时,寄生电容值测得为0.6 fF,这将截止频率提高至1.5 THz。引入并实施了相应的微细加工工艺,该工艺为阳极直径,气桥尺寸和与基底的距离提供了更高的自由度。提供了DC和RF测量,并与仿真进行了比较。为了更好地了解二极管的性能,研究并比较了不同应用的截止频率限制因素。对于混频器/乘法器模式,引入了一种改进和扩展的公式来计算截止频率。结果表明,在混频器/乘法器模式下,可用的偏置电压范围(具有可接受的截止频率)受到结电阻R-j指数减小的限制。 (C)2017 Elsevier Ltd.保留所有权利。

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