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机译:具有自终止TMAH湿式凹槽蚀刻功能的常关AlGaN / GaN基MOS-HEMT
Kyungpook Natl Univ, Sch Elect Engn, Daegu 41566, South Korea;
Kyungpook Natl Univ, Sch Elect Engn, Daegu 41566, South Korea;
Kyungpook Natl Univ, Sch Elect Engn, Daegu 41566, South Korea;
Kyungpook Natl Univ, Sch Elect Engn, Daegu 41566, South Korea;
Kyungpook Natl Univ, Sch Elect Engn, Daegu 41566, South Korea;
Elect & Telecommun Res Inst, RF Power Components Res Grp, 218 Gajeong Ro, Daejeon 34129, South Korea;
Elect & Telecommun Res Inst, RF Power Components Res Grp, 218 Gajeong Ro, Daejeon 34129, South Korea;
Agcy Def Dev, POB 35-3, Daejeon 34186, South Korea;
Kyungpook Natl Univ, Sch Elect Engn, Daegu 41566, South Korea;
Grenoble Polytech Inst, Inst Microelect Electromagnestim & Photon, F-38016 Grenoble, France;
Kyungpook Natl Univ, Sch Elect Engn, Daegu 41566, South Korea;
Normally-off; Gate recess; Self-terminating wet etching; TMAH solution; Negligible hysteresis;
机译:AlGaN / GaN常关型MOSFET自终止栅极凹槽湿法刻蚀工艺中的氧化工艺研究
机译:用于制造高度均匀的凹槽AlGaN / GaN高电子移动晶体管(HEMT)的自终止接触光电化学(CL-PEC)蚀刻
机译:利用自终止栅刻蚀技术制备常关AlGaN / GaN MOSFET
机译:常开外延结构上的常关AlGaN / GaN凹陷MOS-HEMT,适用于微波功率应用
机译:研究常关模式的AlGaN / GaN MOS HEMT器件,该器件利用栅极后退和p-GaN栅极结构以及带有醛生长的高k栅极绝缘体来实现高功率应用。
机译:用多指架构调制对高功率应用的自终止蚀刻技术常关P-GAN / ALGAN / GAN HEMT的研究
机译:通过ICP-RIE氧化和湿法刻蚀可控制刻蚀速率的AlGaN / GaN的精密凹槽