Role of deposition and annealing of the top gate dielectric in a-IGZO TFT-based dual-gate ion-sensitive field-effect transistors

摘要

The deposition of the top gate dielectric in thin film transistor (TFT)-based dual-gate ionsensitive field-effect transistors (DG ISFETs) is critical, and expected not to affect the bottom gate TFT characteristics, while providing a higher pH sensitive surface and efficient capacitive coupling between the gates. Amorphous Ta2O5, in addition to having good sensing properties, possesses a high dielectric constant of similar to 25 making it well suited as the top gate dielectric in a DG ISFET by providing higher capacitive coupling (ratio of C-top/C-bottom) leading to higher amplification. To avoid damage of the a-IGZO channel reported to be caused by plasma exposure, deposition of Ta2O5 by e-beam evaporation followed by annealing was investigated in this work to obtain sensitivity over the Nernst limit. The deteriorated bottom gate TFT characteristics, indicated by an. increase in the channel conductance, confirmed that. plasma exposure is not the sole contributor to the changes. Oxygen vacancies at the Ta2O5/a-IGZO interface, which emerged during processing, increased the channel conductivity, became. filled by optimum annealing in oxygen at 400 degrees C for 1 h, which was confirmed by an. x-ray photoelectron spectroscopy. depth profiling analysis. The obtained pH sensitivity of the TFTbased DG ISFET was 402 mV pH(-1), which is about 6.8 times the Nernst limit (59 mV pH(-1)). The concept of capacitive coupling was also demonstrated by simulating an a-IGZO-based DG TFT structure. Here, the exposure of the top gate dielectric to. the electrolyte without applying any top gate bias led to changes in the measured threshold voltage of the bottom gate TFT, and this obviated the requirement of a reference electrode needed in conventional ISFETs and other reported DG ISFETs. These devices, with high sensitivities and requiring low volumes (similar to 2 mu l) of analytesolution, could be potential candidates for utilization as chemical sensors and biosensors.