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Limitation of simple np-n tunnel junction based LEDs grown by metal-organic vapor phase epitaxy

机译:金属 - 有机气相外延生长的简单NP-N隧道结的限制

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摘要

We show evidence that tunnel junctions (TJs) in GaN grown by metal-organic vapor phase epitaxy are dominated by defect level-assisted tunneling. This is in contrast with the common belief that highly doped layers (10(20)cm(-3)) are required to narrow the TJ space charge region and promote the band-to-band tunneling. Our conclusion stems from the study and the review of the major doping limitations of carefully optimized p(++)and n(++)layers. The secondary ions mass spectroscopy profiles of GaN based TJ LEDs show a strong oxygen concentration located close to the p(++)(++)interface, typical for three dimensional growth. In addition, considering the doping limitation asymmetry and Mg carry-over, our simulations indicate a depletion region of more than 10 nm which is buried in a rough and defective n(++)layer. However, decent electrical characteristics of the studied TJ based LEDs are obtained, with a low penalty voltage of 1.1 V and a specific differential resistance of about 10(-2)omega.cm(2)at 20 mA. This indicates that a common TJ could be greatly optimized by using a moderate doping (similar to 10(19)cm(-3)) while intentionally introducing local defects within the TJ.
机译:我们展示了通过金属 - 有机气相外延生长的GaN中的隧道结(TJS)由缺陷水平辅助隧道占据主导。这与常用层(> 10(20)cm(-3))缩小TJ空间电荷区域并促进带状带隧道的共同信念相反。我们的结论源于研究和审查精心优化的P(++)和N(++)层的主要掺杂限制。基于GaN的TJ LED的二次离子质谱谱显示出靠近P(++)/ N(++)界面的强氧浓度,典型为三维生长。另外,考虑到掺杂的限制不对称和Mg随身携带,我们的模拟表明耗尽区域超过10nm,其埋在粗糙和有缺陷的N(++)层中。然而,获得了研究基于TJ的LED的体面的电特性,低罚金电压为1.1V,特定的差速电阻为20mA,约10(2)Ω/厘米(2)。这表明通过使用中等掺杂(类似于10(19)cm(-3))可以大大优化普通TJ,同时有意地在TJ内引入局部缺陷。

著录项

  • 来源
    《Semiconductor science and technology》 |2020年第11期|115005.1-115005.10|共10页
  • 作者单位

    Nagoya Univ Inst Mat & Syst Sustainabil IMaSS Nagoya Aichi Japan;

    Univ Clermont Auvergne Polytech Clermont Ferrand Clermont Ferrand France;

    Nagoya Univ Inst Mat & Syst Sustainabil IMaSS Nagoya Aichi Japan;

    Nagoya Univ Inst Mat & Syst Sustainabil IMaSS Nagoya Aichi Japan;

    Univ Clermont Auvergne Inst Pascal CNRS SIGMA Clermont F-63000 Clermont Ferrand France;

    Univ Clermont Auvergne Inst Pascal CNRS SIGMA Clermont F-63000 Clermont Ferrand France;

    Nagoya Univ Inst Mat & Syst Sustainabil IMaSS Nagoya Aichi Japan;

  • 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);美国《生物学医学文摘》(MEDLINE);
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

    GaN; LED; tunnel junction;

    机译:GaN;LED;隧道交界处;

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