Fab Esh: Prepare Better, Minimize Impact

摘要

In recent years, several fab environmental, safety and health (ESH) challenges and trends have emerged, with an emphasis on new tool and chemical safety and an overall heightened focus on using "green" building and manufacturing to both minimize environmental impact and improve efficiency. As described in the 2007 edition of the International Technology Roadmap for Semiconductors (ITRS), the four basic ESH strategies focus on characterizing processes and materials during the development phase, using materials that are less hazardous or that have less hazardous byproducts, designing products and systems (equipment and facilities) that consume less raw materials and resources, and making fabs a safe place for employees to work. Difficult ESH challenges outlined in the ITRS involve high-level categories such as chemicals and materials management, process and equipment management, facilities technology requirements, and sustainability and product stewardship.