Setting Standards for Sealing

摘要

In chip production, every facet of the process is created and designed with the most sophisticated tools, the most amazing technology and the most advanced controls.rnSuper-stringent requirements are applied to each of the fabrication steps, which are guarded with process definitions, controls and documentation that forbid any variation or anomaly. As semiconductor technologies continue to evolve to higher and higher levels, the bar is raised at every step.rnWith so much emphasis on precision and tight tolerances, why has there not been any measure of "control" - any standardization, any requireraeat applied in the realm of specialized seals and O-rings used throughout every wafer fab? Why have sealing standards not been addressed when virtually all deposition and etching equipment's critical process performance depends on them?