Using Gray-Based Taguchi Method to Construct Multi-Objective Optimal Model in Super-Resolution Near-Field Photolithography

Ching-Been Yang; Hsiu-Lu Chiang

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Using Gray-Based Taguchi Method to Construct Multi-Objective Optimal Model in Super-Resolution Near-Field Photolithography

机译：使用基于灰色的Taguchi方法构造超分辨率近场光刻多目标优化模型

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来源
《Scanning》 |2013年第1期|1-12|共12页
作者
Ching-Been Yang; Hsiu-Lu Chiang;
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作者单位

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收录信息美国《科学引文索引》(SCI);美国《工程索引》(EI);美国《化学文摘》(CA);
原文格式 PDF
正文语种 eng
中图分类
关键词
near-field photolithography (NFP); line segment fabrication; thermally induced super-resolution; Taguchi method; gray relational analysis;

机译：近场光刻;线段制作;热致超分辨率;田口法;灰色关联分析;

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专利

1. Combining the Taguchi method with an artificial neural network to construct a prediction model for near-field photolithography experiments [J] . Z-C Lin, C-B Yang Proceedings of the Institution of Mechanical Engineers, Part C: Journal of Mechanical Engineering Science . 2010,第10期

机译：将Taguchi方法与人工神经网络结合以构建用于近场光刻实验的预测模型
2. Combining the Taguchi method with an artificial neural network to construct a prediction model for near-field photolithography experiments [J] . Z.-C. Lin, C.-B. Yang Proceedings of the Institution of Mechanical Engineers, Part C. Journal of mechanical engineering science . 2010,第10期

机译：将Taguchi方法与人工神经网络结合以构建用于近场光刻实验的预测模型
3. Optimization modeling of the cooling stage of reflow soldering process for ball grid array package using the gray-based Taguchi method [J] . Chun-Sean Lau, M.Z. Abdullah, F. Che Ani Microelectronics reliability . 2012,第6期

机译：基于灰色Taguchi方法的球栅阵列封装回流焊接工艺冷却阶段的优化建模
4. Optimization of the Ultra-narrow-gap-welding Procedure via Gray-based Taguchi Method [C] . Guodong Zhang, Fuju Zhang, Min Hong, International Symposium on Computer-Aided Welding Engineering(CAWE 2006) vol.2; 20061019-22; Jinan(CN) . 2006

机译：基于灰色的田口方法的超窄缝焊接工艺优化
5. Post-Pareto optimality methods for the analysis of large Pareto sets in multi-objective optimization. [D] . Carrillo, Victor M. 2013

机译：多目标优化中用于分析大型Pareto集的后Pareto最优方法。
6. A simple and reliable Taguchi approach for multi-objective optimization to identify optimal process parameters in nano-powder-mixed electrical discharge machining of INCONEL800 with copper electrode [O] . B.V. Dharmendra, Shyam Prasad Kodali, B. Nageswara Rao 2019

机译：一种简单可靠的Taguchi方法用于多目标优化以识别具有铜电极的INCONEL800的纳米粉末混合放电加工中的最佳工艺参数
7. Multi-objective optimal sizing of distributed generation by application of Taguchi desirability function analysis [O] . Varsha S. Galgali, M. Ramachandran, G. A. Vaidya 2019

机译：塔纽奇期望函数分析应用分布生成多目标最佳尺寸

Using Gray-Based Taguchi Method to Construct Multi-Objective Optimal Model in Super-Resolution Near-Field Photolithography

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