Stability study of all-permanent-magnet electron cyclotron resonance ion source a

摘要

Beam intensity fluctuation was investigated using an electron cyclotron resonance ion source of an all-permanent-magnet type under development for highly stable beam intensity. While the source achieved a stability of better than 3.2% by strict regulation of the coolant temperature change within ±0.1 °C, the intensity varies strongly with intentional changes in the temperature of the plasma chamber coolant. The influence of the temperature on chamber expansion, magnetic field strength, and vacuum was measured or estimated in detail. The result shows that a slight change in vacuum and magnetic field strength has considerable influence on the intensity fluctuation. © 2010 American Institute of Physics Article Outline INTRODUCTION OUTLINE OF THE SOURCE BEAM INTENSITY FLUCTUATION DUE TO COOLANT TEMPERATURE Chamber expansion Magnetic field change Vacuum change FURTHER STABILIZATION