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METROLOGY SYSTEMS, TEMPORAL AND SPATIAL COHERENCE SCRAMBLER AND METHODS THEREOF

机译:计量系统,时间和空间相干扰扰器及其方法

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In some embodiments, a system comprises a radiation source, an optical element, a detector, and a processor. The radiation source configured to generate a beam of radiation. The optical element is configured to produce a non-uniform change in a phase of the beam of radiation and to output a coherence-scrambled radiation for irradiating a target. The optical property of the optical element is tunable so as to change an amount of incoherence of the coherence-scrambled radiation. The detector is configured to receive radiation scattered by the target and to generate a measurement signal based on the received radiation. The processor is configured to analyze the measurement signal to determine a characteristic of the target. In some embodiments, a coherence scrambler device comprises a metasurface and a controller, The metasurface is configured to receive coherent radiation and to produce a non-uniform change in a phase of the coherent radiation. The controller is configured to tune an optical property of the melasurface so as to change an amount of incoherence of the coherent radiation to generate coherence-scrambled radiation. In some embodiments, a method comprises receiving incident light radiation on a metasurface. The metasurface causes a change in a phase of the incident light radiation. The method also comprises applying a signal to the metasurface to tune an optical property of the metasurface so to change an amount of incoherence of the incident light radiation, remitting coherence-scrambled radiation from the metasurface, and irradiating a target with the coherence-scrambled radiation. Further features and advantages of the invention, as well as the structure and operation of various embodiments of the invention, are described in detail below with reference to the accompanying drawings. It is noted that the invention is not limited to the specific embodiments described herein. Such embodiments are presented herein for illustrative purposes only. Additional embodiments will be apparent to persons skilled in the relevant art(s) based on the teachings contained herein.
机译:在一些实施例中,系统包括辐射源,光学元件,检测器和处理器。辐射源被配置为产生辐射束。光学元件被配置为在辐射束的相位中产生不均匀的变化,并输出用于照射目标的相干扰辐射。光学元件的光学性能可调谐,以改变相干扰辐射的不相干量。检测器被配置为接收由目标散射的辐射,并基于所接收的辐射产生测量信号。处理器被配置为分析测量信号以确定目标的特性。在一些实施例中,相干扰扰器装置包括元表面和控制器,所述元件构造成接收相干辐射并在相干辐射的相位中产生不均匀的变化。控制器被配置为调谐熔体表面的光学性质,以改变相干辐射的不相干,以产生相干扰辐射。在一些实施例中,一种方法包括在元表面上接收入射光辐射。 METasurface导致入射光辐射的阶段的变化。该方法还包括将信号施加到元表面,以调谐元表面的光学性质,以改变入射光辐射的不相干量,延长来自元表面的相干扰辐射,并用相干加扰辐射照射目标。下面参考附图详细描述本发明的进一步特征和优点,以及本发明的各种实施例的结构和操作。应注意,本发明不限于本文描述的具体实施方案。此类实施例本文仅出于用于说明目的。基于本文包含的教导,另外的实施例对于相关技术的技术人员来说是显而易见的。

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    《Research Disclosure》 |2021年第688期|2128-2129|共2页
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