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首页> 外文期刊>Research Disclosure >A POSITIONING SYSTEM, A LITHOGRAPHIC APPARATUS, A DRIVING FORCE ATTENUATION METHOD, AND A DEVICE MANUFACTURING METHOD
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A POSITIONING SYSTEM, A LITHOGRAPHIC APPARATUS, A DRIVING FORCE ATTENUATION METHOD, AND A DEVICE MANUFACTURING METHOD

机译:定位系统,光刻设备,驱动力衰减方法和器件制造方法

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摘要

Considering the above, it is an object of the invention to provide a positioning system with an improved, i.e. reduced, actuator force transmissibility. According to an embodiment of the invention, there is provided a positioning system for moving or positioning a moveable object. According to another embodiment of the invention, there is provided a lithographic apparatus comprising a positioning system according to the invention. According to a further embodiment of the invention, there is provided a method for attenuating transmission of driving forces applied between a moveable object and a reaction mass of a dynamic support system by configuring the dynamic support system as a multiple-spring-mass-damper system having a first eigenfrequency and a second eigenfrequency in a direction that are substantially the same. According to yet another embodiment of the invention, there is provided a device manufacturing method wherein use is made of a lithographic apparatus according to the invention.
机译:考虑到上述情况,本发明的一个目的是提供一种具有改进的定位系统,即减小,致动器力传递率。根据本发明的实施例,提供了一种用于移动或定位可移动物体的定位系统。根据本发明的另一个实施例,提供了一种光刻设备,包括根据本发明的定位系统。根据本发明的另一实施例,提供了一种通过将动态支撑系统配置为多弹簧质量阻尼系统,提供了一种用于衰减在可移动物体和动态支撑系统的反应物质之间施加的驱动力的传动方法的方法在基本相同的方向上具有第一个特征频率和第二个特征频率。根据本发明的又一个实施例,提供了一种装置制造方法,其中使用根据本发明的光刻设备。

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    《Research Disclosure》 |2021年第686期|2017-2018|共2页
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