Vacuum Compatible Small Volume Camera Supporting Diagnostics in Lithography Systems

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Vacuum Compatible Small Volume Camera Supporting Diagnostics in Lithography Systems

机译：真空兼容的小卷摄像机支持光刻系统中的诊断

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Exemplary lithography metrology methods and systems are disclosed for reticle diagnostics.

机译：用于掩模版诊断的示例性光刻计量方法和系统。

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《Research Disclosure》 |2020年第669期|87-88|共2页
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1. Supporting High Picture Quality Equivalent to Compact Digital Cameras - 8-Megapixel Compatible Cell Phone Camera Engine Solution 'CE131' [J] . OOYA Akitaka, MATSUMOTO Hisami, KAWAGUCHI Hiroshi NEC technical journal . 2009,第1期

机译：支持与紧凑型数码相机相当的高画质-兼容8兆像素的手机相机引擎解决方案'CE131'
2. Development of a Gastric Cancer Diagnostic Support System with a Pattern Recognition Method Using a Hyperspectral Camera [J] . Ogihara Hiroyuki, Hamamoto Yoshihiko, Fujita Yusuke, Journal of Sensors . 2016,第Pta1期

机译：利用高光谱相机的模式识别方法开发胃癌诊断支持系统
3. Development of a Gastric Cancer Diagnostic Support System with a Pattern Recognition Method Using a Hyperspectral Camera [J] . HiroyukiOgihara, YoshihikoHamamoto, YusukeFujita, Journal of Sensors . 2016,第1期

机译：利用高光谱相机的模式识别方法开发胃癌诊断支持系统
4. Construction of a diagnostic support system for circulatory disease in a volume communications environment [C] . Okuda, M., Watanabe, . 2005

机译：体积通信环境中循环系统疾病诊断支持系统的构建
5. Investigation of amorphous hydrogenated silicon as a resist for vacuum-compatible lithography of mercury cadmium telluride/cadmium telluride films. [D] . Jacobs, Randolph Nicholas. 2005

机译：研究非晶态氢化硅作为汞碲化镉/碲化镉薄膜真空兼容光刻的抗蚀剂。
6. Moving system with action sport cameras: 3D kinematics of the walking and running in a large volume [O] . Gustavo R. D. Bernardina, Tony Monnet, Pietro Cerveri, 2019

机译：带动作运动摄像机的移动系统：3D行驶和在大容量中运行的运动学
7. INVESTIGATION OF AMORPHOUS HYDROGENATED Si AS A RESIST FOR VACUUM-COMPATIBLE LITHOGRAPHY OF HgCdTe/CdTe FILMS [O] . Jacobs Randolph N 2005

机译：非晶态氢化硅作为HgCdTe / CdTe膜真空兼容光刻技术的研究
8. Miniature, vacuum compatible 1024 {times} 1024 CCD camera for x-ray, ultra-violet, or optical imaging [R] . 1994

机译：微型，真空兼容1024 {倍} 1024 CCD相机，用于X射线，紫外线或光学成像

Vacuum Compatible Small Volume Camera Supporting Diagnostics in Lithography Systems

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