A coupling assembly for connecting a vacuum line to a vessel

摘要

This research disclosure relates to a coupling assembly for connecting a vacuum line or hose to a vacuum vessel. More in particular this invention relates to a coupling assembly used in an EUV Radiation source vessel. For the present coupling assembly it is important to isolate the vessel from the vibrations that can arise from the vacuum pump or from floor vibrations acting on the vacuum line. Pressure di fferences in- and outside the vacuum line create forces acting on the coupling. The resulting disturbing forces need to be balanced lo prevent misalignment and drift oflhe vacuum vessel. In a vessel used to create EUV Radiation vibrations wherein EUV light is created by converting a fuel into a plasma with laser light it is important to reduce vibrations of the vessel. These vibrations will a reduced conversion efficiency wit which the laser light is transferred into EUV light.