Influence of the Gas Humidity on the Uniformity of RF-Powered Atmospheric-Pressure Low-Temperature DBD Plasmas

摘要

The uniformity of atmospheric pressure DBDs in He was studied as a function of the water level in the gas mixture using emission spectroscopy. It was found that the discharge switched from a uniform glow to a steamer-like discharge as the water concentration was increased in the gas feed. It was also found that the average electron density in the discharge region decreased, while the average rotational and vibrational temperatures increased dramatically.