Surface processing of CdTe crystals by an excimer laser and its application in fabricating nuclear radiation detectors

摘要

Excimer laser based surface processing of CdTe crystals is investigated in two different ways, namely laser ablation and laser enhanced impurity doping, for their applications in fabrication of nuclear radiation detectors. Micro-pattering on CdTe surface is performed by irradiating the laser through a shadow mask placed on the CdTe in a high vacuum condition. On the other hand, single pulse laser irradiation on the thin In-layer evaporated CdTe surface at a high-pressure argon gas environment produced an In-doped n-type thin surface layer. Finally, a strip type CdTe nuclear imaging detector was constructed by utilizing these two distinct features of excimer laser.