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Leakage current in high-purity germanium detectors with amorphous semiconductor contacts

机译:具有非晶半导体触点的高纯锗探测器中的泄漏电流

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摘要

Amorphous semiconductor electrical contacts on high-purity Ge radiation detectors have become a valuable technology because they are simple to fabricate, result in thin dead layers, block both electron and hole injection, and can readily be finely segmented as needed for applications requiring imaging or particle tracking. Though significant numbers of detectors have been successfully produced for a variety of applications using the amorphous semiconductor contact technology, there remains a need to better understand the dependence of performance characteristics, particularly leakage current, on the fabrication process parameters so that the performance can be better optimized. To this end, we have performed a systematic study of leakage current on RF-sputter-deposited amorphous-Ge (a-Ge) and amorphous-Si (a-Si) contacts as a function of process and operational parameters including sputter gas pressure and composition, number of detector temperature cycles, and time spent at room temperature. The study focused primarily on the current resulting from electron injection at the contact. Significant findings from the study include that a-Si produces lower electron injection than a-Ge, the time the detector spends at room temperature rather than the number of temperature cycles experienced by the detector is the primary factor associated with leakage current change when the detector is warmed, and the time stability of the a-Ge contact depends on the sputter gas pressure with a higher pressure producing more stable characteristics.
机译:高纯度Ge辐射探测器上的非晶半导体电触点已经成为一项有价值的技术,因为它们易于制造,导致薄的死层,阻挡电子和空穴注入,并且可以根据需要用于成像或颗粒的应用轻松细分跟踪。尽管已经使用非晶半导体接触技术成功生产出了用于各种应用的大量检测器,但是仍然需要更好地了解性能特征(尤其是漏电流)对制造工艺参数的依赖性,以便可以更好地提高性能。优化。为此,我们对RF溅射沉积的非晶Ge(a-Ge)和非晶Si(a-Si)触点上的泄漏电流进行了系统研究,该过程取决于工艺和操作参数,包括溅射气体压力和组成,检测器温度循环次数以及在室温下花费的时间。该研究主要集中在触点电子注入产生的电流上。该研究的重要发现包括:a-Si产生的电子注入量低于a-Ge,检测器在室温下停留的时间而不是检测器经历的温度循环次数是与检测器泄漏电流变化相关的主要因素温度升高,a-Ge触点的时间稳定性取决于溅射气体压力,压力越高,产生的特性越稳定。

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  • 来源
  • 作者

    Q. Looker; M. Amman; K. Vetter;

  • 作者单位

    Ernest Orlando Lawrence Berkeley National Laboratory, University of California, Berkeley, California 94720, USA,Department of Nuclear Engineering, University of California, Berkeley, California 94720, USA;

    Ernest Orlando Lawrence Berkeley National Laboratory, University of California, Berkeley, California 94720, USA;

    Ernest Orlando Lawrence Berkeley National Laboratory, University of California, Berkeley, California 94720, USA,Department of Nuclear Engineering, University of California, Berkeley, California 94720, USA;

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  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

    Gamma-ray detectors; High-purity germanium; Radiation detectors; Semiconductor radiation detectors;

    机译:伽马射线探测器;高纯锗;辐射探测器;半导体辐射探测器;

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