Novel Sensors Based on Microwave Acoustic Thin-Film Resonators for Radio-Frequency Ecological Monitoring

摘要

A new type of temperature, pressure, and gas-composition sensors built around microwave thin-film resonators based on bulk acoustic waves is proposed. Possible parameters of these sensors are analyzed numerically. It is shown that such sensors can operate at higher frequencies than surface acoustic wave devices and are more sensitive and smaller than well-known surface-acoustic-wave sensors. Being compatible with small microwave antennas, they are suitable for use in passive wireless sensors applied in remote ecological monitoring systems.