Study of layered structures using modified acoustic resonator spectroscopy

摘要

A software package that makes it possible to record scans of the microwave spectrum of the high-overtone bulk acoustic resonator (HBAR) with an arbitrary frequency step in the entire range of the network analyzer is developed. Parameters (frequency and width) of several thousand resonant peaks can be obtained using the computerized processing of the scans. The proposed procedure allows an increase in the accuracy of the existing method for the measurement of the velocity of acoustic wave in material. For the layers with a thickness of several wavelengths, the method makes it possible to obtain the velocities of waves in the material under study using a single spectrum and does not require the comparison of the HBAR spectra measured prior to and after the deposition of the layer under study.