半導体化学イメージセンサの微小流路計測への応用に関する研究

摘要

The Light-Addressable Potentiometric Sensor (LAPS) is a semiconductor-based chemical sensor with an electorolyte - insulator - semiconductor (EIS) structure. The LAPS can have many measuring points integrated on the sensing surface, which are individually accessed by a light beam. In this study, LAPS was applied to the imaging of microfluidic channels. A planer electrode at the top of the microfluidic channel was used to obtain uniform signal throughout the channel. A scanning system with an LED array was developed for high-speed scanning.%流路上部全面を平面電極とすることにより，流 路内において均一な光電流値を得ることができた． 流路下流に参照電極を設置することにより，酸化 還元電位の影響を受けず測定をすることができた． また，高速化のために複数のLEDを用いたスキ ャン装置を開発した．