A silicon rectangular micro-orifice for gas flow measurement at moderate Reynolds numbers: design, fabrication and flow analyses

摘要

This work describes a micro-flowmeter for moderate flow rates of gases based on a differential pressure measurement. The micro-flowmeters consist of a microfabricated silicon-glass rectangular micro-orifice plate, with external pressure measurement. We experimentally evaluate the effects of geometrics parameters, Reynolds number and compressibility on the discharge coefficient. The paper examines a series of 13 rectangular micro-orifice sizes, with orifice hydraulic diameters ranging from 115 to 362 A mu m. The behavior of the discharge coefficient is presented for orifice Reynolds numbers ranging from 200 to 18000. Agreement is shown between the experimental and numerical results of the discharge coefficient. The micro-flowmeters measure moderate flow of air ranging from 1 to 106 mg/s. This demonstration implements a design method of micro-flowmeters that can be used in a broad range of microfluidic applications, such as microreactors and power MEMS.