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Factors affecting the long-term stability of Cu/Al ball bonds subjected to standard and extended high temperature storage

机译:标准和长期高温存储下影响Cu / Al球形键长期稳定性的因素

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摘要

This paper presents the findings of work performed on 20-μm diameter copper wire of five different wire types from three suppliers. Gold wire is the control. The test die was mounted on BT (B (Bismaleimide) and T (Triazine)) resin substrates. The bonding parameters were optimized for each wire used. Part of the optimization process involved monitoring the flatness of the bonded ball and the amount of aluminum remaining under the bond. The crystal structure of each type of interconnect was examined using composite imaging techniques. Visual data such as ball size, thickness, and shape were collected. First and second bonds were subjected to destructive testing, such as ball shear and wire pull, throughout the preparation process. The samples were then subjected to an industry-standard, high temperature stress test to determine the long-term stability of the interface of each wire type. Data for all read points are presented on all tests performed and provide useful information on the material and process set best suited for long term reliability.
机译:本文介绍了对来自三个供应商的五种不同类型的直径为20μm的铜线进行的工作发现。金线是控制。将测试模具安装在BT(B(Bismaleimide)和T(Triazine))树脂基板上。结合参数针对每条使用的导线进行了优化。优化过程的一部分涉及监视键合球的平整度和键合下残留的铝量。使用复合成像技术检查了每种互连的晶体结构。收集了视觉数据,例如球的大小,厚度和形状。在整个制备过程中,对第一键和第二键进行破坏性测试,例如滚珠剪切和拉线。然后对样品进行行业标准的高温应力测试,以确定每种导线类型的界面的长期稳定性。所有执行的测试均会提供所有读取点的数据,并提供最适合长期可靠性的材料和工艺组的有用信息。

著录项

  • 来源
    《Microelectronics reliability》 |2011年第1期|p.137-147|共11页
  • 作者单位

    ASM Technology Singapore Pte. Ltd., 2 Yishun Avenue 7, Singapore 768924, Singapore;

    ASM Technology Singapore Pte. Ltd., 2 Yishun Avenue 7, Singapore 768924, Singapore;

    ASM Technology Singapore Pte. Ltd., 2 Yishun Avenue 7, Singapore 768924, Singapore;

  • 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

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