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Fabrication of 316-L stainless steel micro components using encapsulating soft mould and isopressing technique

机译:封装软模和等压技术制造316-L不锈钢微型零件

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摘要

This paper presents in detail a new method to fabricate free standing 316-L stainless steel micro components using high solid loading stainless steel semi solid paste encapsulated into soft mould (PDMS) and pressed using hydrostatic pressure. The process is divided into five parts: (ⅰ) production of SU-8 master moulds and their negative replicas from soft moulds, (ⅱ) preparation of stainless steel semi solid paste with high solid loading and filling the soft mould insert, (ⅲ) the soft mould is sealed well and put under hydrostatic pressure, (ⅳ) after the pressure is released the soft mould seal is removed and the paste is left to dry, (ⅴ) the green parts are obtained, de-bound, and sintered in vacuum at 1350 ℃. The effect of the applied hydrostatic pressure on both the green and sintered densities as well as the linear shrinkage of the micro components was investigated in detail and compared with the pressure-less filling method. It is found that both the green and sintered densities increase while the linear shrinkage decreases with the increase of applied hydrostatic pressure. The maximum sintered density and its corresponding linear shrinkage were found to be 98.6% and 13%, respectively.
机译:本文详细介绍了一种新方法,该方法使用封装在软模具(PDMS)中并通过静水压力压制的高固含量不锈钢半固态浆料制造自由站立的316-L不锈钢微部件。该过程分为五个部分:(ⅰ)从软模生产SU-8主模及其负复制品;(ⅱ)制备具有高固含量的不锈钢半固态膏并填充软模嵌件;(ⅲ)将软模具密封好并置于静水压力下,(ⅳ)释放压力后将软模具密封垫取下,并将糊剂干燥,(ⅴ)获得生坯零件,将其脱脂并在其中烧结在1350℃真空。详细研究了施加的静水压力对生坯和烧结坯密度以及微组件线性收缩的影响,并与无压填充方法进行了比较。发现随着施加的静水压力的增加,生坯和烧结的密度均增加,而线性收缩率减小。发现最大烧结密度和其相应的线性收缩率分别为98.6%和13%。

著录项

  • 来源
    《Microelectronic Engineering》 |2010年第8期|1623-1628|共6页
  • 作者

    M. Imbaby; K. Jiang; I. Chang;

  • 作者单位

    School of Mechanical Engineering, University of Birmingham, Edgbaston, Birmingham, UK;

    School of Mechanical Engineering, University of Birmingham, Edgbaston, Birmingham, UK;

    School of Metallurgy and Materials, University of Birmingham, Edgbaston, Birmingham, UK;

  • 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);美国《生物学医学文摘》(MEDLINE);
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

    dispersant; hydrostatic pressure; micro part; soft mould; stainless steel;

    机译:分散剂静水压力;微小的部分软模不锈钢;

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