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首页> 外文期刊>Microelectronic Engineering >Epitaxial growth of Dy_2O_3 thin films on epitaxial Dy-germanide films on Ge(0 0 1) substrates
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Epitaxial growth of Dy_2O_3 thin films on epitaxial Dy-germanide films on Ge(0 0 1) substrates

机译:Ge(0 0 1)衬底上外延Dy-锗化物薄膜上Dy_2O_3薄膜的外延生长

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摘要

Ultra-thin films of Dy are grown on Ge(0 0 1) substrates by molecular beam deposition near room temperature and immediately annealed for solid phase epitaxy at higher temperatures, leading to the formation of DyGe_x films. Thin films of Dy_2O_3 are grown on the DyCe_x film on Ge(0 0 1) substrates by molecular beam epitaxy. Streaky reflection high energy electron diffraction (RHEED) patterns reveal that epitaxial DyGe_x films grow on Ge(0 0 1) substrates with fiat surfaces. X-ray diffraction (XRD) spectrum suggests the growth of an orthorhombic phase of DyGe_x films with (0 01) orientations. After the growth of Dy_2O_3 films, there is a change in RHEED patterns to spotty features, revealing the growth of 3D crystalline islands. XRD spectrum shows the presence of a cubic phase with (10 0) and (111) orientations. Atomic force microscopy image shows that the surface morphology of Dy_2O_3 films is smooth with a root mean square roughness of 10 A.
机译:Dy的超薄膜在室温附近通过分子束沉积在Ge(0 0 1)衬底上生长,并在较高的温度下立即进行固相外延退火,从而导致DyGe_x膜的形成。 Dy_2O_3薄膜通过分子束外延生长在Ge(0 0 1)衬底上的DyCe_x薄膜上。条纹反射高能电子衍射(RHEED)模式表明,外延DyGe_x薄膜在具有平坦表面的Ge(0 0 1)衬底上生长。 X射线衍射(XRD)光谱表明DyGe_x膜具有(0 01)取向的正交相生长。在Dy_2O_3薄膜生长后,RHEED模式变为斑点特征,从而揭示了3D晶体岛的生长。 XRD谱显示存在具有(10 0)和(111)取向的立方相。原子力显微镜图像显示Dy_2O_3膜的表面形态光滑,均方根粗糙度为10A。

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