机译:用于薄膜电子应用的远程等离子体增强的ZnO原子层沉积
Nano Research Croup, University of Southampton, Hampshire SO17 1BJ, UK;
Nano Research Croup, University of Southampton, Hampshire SO17 1BJ, UK;
Nano Research Croup, University of Southampton, Hampshire SO17 1BJ, UK;
Oxford Instruments Plasma Technology, North End, Yatcon, Bristol BS49 4AP, UK;
Oxford Instruments Plasma Technology, North End, Yatcon, Bristol BS49 4AP, UK;
Nano Research Croup, University of Southampton, Hampshire SO17 1BJ, UK;
Nano Research Croup, University of Southampton, Hampshire SO17 1BJ, UK;
Nano Research Croup, University of Southampton, Hampshire SO17 1BJ, UK;
Nano Research Croup, University of Southampton, Hampshire SO17 1BJ, UK;
remote plasma; atomic layer deposition (ALD); ZnO; thin film transistor;
机译:等离子增强原子层沉积生长的ZnO薄膜:“原子层沉积窗口”内外的材料特性
机译:等离子体增强原子层沉积对未掺杂ZnO薄膜的调谐及其在倒置聚合物太阳能电池中的应用
机译:通过等离子体增强原子层沉积制备的鲁棒SiO2栅极介电薄膜涉及脱甲丙基氨基硅烷(DIPA)和氧等离子体:在非晶氧化物薄膜晶体管上施用
机译:肖特基势垒器件的超薄ZnO薄膜的等离子体增强原子层沉积和激光等离子体沉积
机译:用于大面积电路应用的等离子增强原子层沉积ZnO薄膜晶体管。
机译:次饱和等离子体增强原子层沉积法将锌酮样转变为多孔ZnO薄膜
机译:用于薄膜电子应用的远程等离子体增强原子层沉积ZnO
机译:等离子体增强原子层沉积ag薄膜的类似等离子体行为。