Thin-film coating on cylinder for fabrication of cylindrical mold: Roll-to-roll nano-imprint lithography

摘要

An optimized thin-film method for coating on a horizontal rotating cylinder is presented in this paper. The drop-casting technique is used to obtain uniform thin-film coating up to the microano scale. To cover the entire surface, the cylinder rotates about its own axis and the needle applicator moves along it. The thin-film-coated cylinder can be further used as a roller mold in roll-to-roll imprinting after the photolithography process. A supportive theoretical analysis of the drop-casting technique also is presented herein. The theoretical model includes an evolution equation based on lubrication theory and the physics of the needle applicator for the particular experimental setup. The circumstances under which the uniform thin film is generated on a rotating cylinder are investigated for different concentrations of material in appropriate parameter ranges. Additionally, the results of theoretical and experimental investigations are analyzed for the purposes of a comprehensive summary of uniform thin-film coating.