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机译：产品额外！

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Kseries strippers/cleaners from Ashland-ACT are formulated for use with low-K dielectric materials. Currently in beta site tests, the new chemicals can be used with materials such as FOx, FLARE, and SiLK, according to Ashland. Data are available on the chemicals' metal-etch rates and compatibility with low-K dielectric materials. The supplier also offers ACT NP-970 sidewall polymer remover for copper substrates. Information: 614/790-6075.

机译：Ashland-ACT的K系列剥离剂/清洁剂配制用于低K介电材料。根据Ashland的说法，目前正在Beta测试中，这种新化学品可与FOx，FLARE和SiLK等材料一起使用。可获得有关化学品的金属蚀刻速率以及与低K电介质材料的兼容性的数据。供应商还提供用于铜基材的ACT NP-970侧壁聚合物去除剂。信息：614 / 790-6075。

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《Micro》 |1998年第8期|p.63|共1页
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收录信息美国《科学引文索引》(SCI);美国《工程索引》(EI);
原文格式 PDF
正文语种 eng
中图分类环境科学、安全科学;
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