Vendors waste no time responding to need for post-CMP treatment

摘要

In these days of stratospheric production costs and environmental consciousness, few semiconductor manufacturers need or want the added burden of pollution fines. So when a chipmaker in Silicon Valley began to take hits in the pocketbook for improperly discharging CMP effluent into a municipal wastewater stream, the managers grabbed for the phone. Lucid Treatment Systems got the call. Based in Hollister, CA, the company specializes in treating CMP wastewater. The chipmaker was releasing chemically laden slurries from its SpeedFam Auriga polishers with its waste stream, says Jack McCann, Lucid's vice president of sales and marketing.