Investigating a new generation of ESD- induced reticle defects

摘要

New types of static-related reticle damage have been found in 0.25 μm and below production lines. Static-charge problems are well known in semiconductor manufacturing and other high-technology industries. Electrostatic attraction (ESA) increases the deposition of particles onto product surfaces and causes product breakage through the undesirable movement or sticking of products in equipment. Electrostatic discharge (ESD) damages products directly by vaporizing small component features. ESD also interferes with the operation of production equipment, particularly microprocessor-based robotics.