Green research center's Shadman: 'ESH has to be at the heart of process development'

摘要

The National Science Foundation/Semiconductor Research Corp. Engineering Research Center for Environmentally Benign Semiconductor Manufacturing: The moniker is a mouthful, even for semiconductor veterans accustomed to jargon-heavy discourse and an alphabet soup of acronyms and initialisms. But behind the lengthy name is one of the most vibrant collaborative efforts between the chipmaking and academic research communities. In fact, many participants see the ongoing interdisciplinary activities conducted by the center as crucial to the future prosperity of the industry.