IMEC-Numerical Technologies' team to focus research efforts on phase-shift advancements

摘要

Numerical Technologies of San Jose will integrate its proprietary phase-shift technology in IMEC's photolithography development program under the terms of a recently signed partnership agreement. Numerical will work with the Belgian R&D consortium on new technologies and processes for 193-nm wavelengths during the three-year pact. The U.S. firm will provide phase shifting technology, training, and support services to IMEC and member companies.