Conducting early assessments of semiconductor manufacturing tools

摘要

In a technologically advanced and socially responsible manufacturing world, employing environmentally safe methods of development and production is critical to mitigating environmental, health, and safety (EHS) concerns at the earliest stages of a product's life. Just as medical professionals urge that people take precautionary daily actions by brushing their teeth, exercising regularly, and following a healthy diet to prevent disease, so too must semiconductor equipment manufacturers perform preliminary equipment inspections to identify and prevent safety issues during the life of their capital equipment.