A Compact Hall-Effect-Sensing 6-DOF Precision Positioner

摘要

This paper presents the design, control, and implementation of a compact high-precision multidimensional positioner. A 1.52-kg single levitated moving part, named as the platen, generates all six-axis fine and coarse motions, resulting in a reliable and effective positioning system. Three laser distance sensors are used to measure its vertical translational motion and $x$- and $y$-axis rotational motion. Three two-axis Hall-effect sensors are used to determine its lateral motions and rotational motion about the $z$ -axis by measuring the magnetic flux density generated by a magnet matrix. Real-time control is implemented on a Linux-based operating system, Real-Time Application Interface (RTAI) with COntrol and MEasurement Device Interface (Comedi) and Comedi libraries. A maximum travel of 220 mm in the $x$ -direction and 200 mm in the $y$-direction, and a rotation angle of 18.6$^{circ}$ about the $z$-axis were achieved experimentally. A maximum velocity of 0.3 m/s with an acceleration of 3.6 m/s$^2$ was obtained in the $y$-direction. Step responses the demonstrated a 10- $mu$m resolution and 6-$mu$ m rms noise in the translational mode. This compact single-moving-part positioner is suitable for use in precision-positioning systems, e.g., in se-n-nmiconductor manufacturing.