OPTOPHYSICAL MEASUREMENTS: INVESTIGATIONS OF THE SPATIAL DISTRIBUTION OF THE ENERGY CHARACTERISTICS OF PLASMA RADIATORS FOR A SYSTEM OF ASSURANCE OF UNIFORMITY OF MEASUREMENTS IN NANOLITHOGRAPHY

摘要

A comparator that incorporates an imaging system and a position-sensitive detector is developed. The comparator supports the formation of spectro-zonal images with calibration in units of radiance and radiant intensity through the use of synchrotron radiation. A comparator is needed to obtain information about the distribution of the radiance of plasma radiators used in nanolithography in the area of extremal vacuum ultraviolet radiation.