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Influences of thickness-uniformity and surface morphology on the electrical and optical properties of sputtered CdTe thin films for large-area II-VI semiconductor heterostructured solar cells

机译:厚度均匀性和表面形态对大面积II-VI半导体异质结构太阳能电池溅射CdTe薄膜的电和光学性能的影响

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摘要

It is well known that, theoretically, thin-film cadmium telluride (CdTe) solar cell technology can improve on the conversion efficiency and production costs of conventional silicon solar cell technology. Due to the optimal band gap energy (about 1.4 eV) for solar energy absorption, high light absorption capability and lower cost requirements for solar cell production, CdTe has been widely researched as being suitable for commercial cell production. In this study, the sputtering method, which can improve on the cost-efficiency and mass-production of solar cells, was employed to deposit the CdTe thin film with various processing conditions such as sputtering power, and gas pressure. The effects of the processing conditions on the thickness-uniformity and surface morphology of the CdTe thin films were investigated using atomic force microscope (AFM) and ellipsometry for large-area solar cells. The photovoltaic properties of CdTe thin films were analyzed in relation to the different thickness-uniformity and surface morphology caused by the various process conditions. The thickness-uniformity, which was controlled by the process conditions in the sputtering process, was found to affect the photovoltaic properties of the sputtering-deposited CdTe thin films. Higher carrier concentration and better optical absorbance were obtained in CdTe thin films with a good thickness-uniformity.
机译:众所周知,从理论上讲,薄膜碲化镉(CdTe)太阳能电池技术可以提高传统硅太阳能电池技术的转换效率和生产成本。由于用于太阳能吸收的最佳带隙能量(约1.4 eV),高的光吸收能力以及对太阳能电池生产的较低成本要求,CdTe已被广泛研究以适合商业电池生产。在这项研究中,采用可以提高太阳能电池的成本效率和批量生产的溅射方法,以溅射功率和气压等各种处理条件沉积CdTe薄膜。利用原子力显微镜(AFM)和椭偏仪对大面积太阳能电池研究了工艺条件对CdTe薄膜厚度均匀性和表面形貌的影响。分析了CdTe薄膜的光电性能与各种工艺条件引起的不同厚度均匀性和表面形态之间的关系。发现由溅射工艺中的工艺条件控制的厚度均匀性影响溅射沉积的CdTe薄膜的光电性能。在具有良好厚度均匀性的CdTe薄膜中获得了更高的载流子浓度和更好的光吸收率。

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